Frontline introduces a simpler method for using the Dynamic Etch Compensation Action. This method uses a new DFM action with a simpler graphic user interface. The new action is called Dynamic Etch Compensation (Simplified) .
This DFM action automatically accomplishes all required tasks and invokes the Detch algorithm. Current functionality is not changed in any way. (The two actions are expected to produce the same results given identical parameters.) The license option remains the same as well.
The major limitation of the simplified action is that the action does not distinguish between different feature types - the same compensation is carried out for all features, and the same minimum spacing maintained. In real life, many customers claim that etchant does not make such a differentiation; etchant works on copper and not on features. For these customers, this limitation is not relevant at all. But all the powerful dynamics of the compensation process are still available through the simpler and more flexible user interface.
The Dynamic Etch Compensation algorithm used by this simplified action uses a single compensation function (table) and a single minimum spacing parameter, without respect to features types. The function can be defined either by an external text file (as is done currently) or by sets of value pairs < spacing value, compensation value> as seen in the screen below. Up to 6 pairs of value sets may be defined. Be sure to choose the desired Interpolation parameter (Steps or Linear).
If less than 6 pairs of value sets are needed, enter negative values in the unused value fields to end the definitions. Be sure to choose the desired Interpolation parameter (Steps or Linear). If less than 6 pairs of value sets are used, the function is created automatically, with the missing parameters assigned the hardcoded defaults.
The function can be saved in a file for future use by both
existing and new actions (even if no layer is being compensated). This allows
the action to provide an interface for the generation of compensation tables.
The ERF variables remain the same. The ERF file name is ddetch.erf.