Dynamic Etch Compensation (Simplified):

 

The following text is taken from Doc. 0602.

 

 

The pp_comp_func parameter defines the function file name, the pp_spc1, pp_cmp1, …, pp_spc6, pp_cmp6 parameters

define (up to) 6 pairs of <spacing, compensation>, which, together with the pp_interpolation parameter, define the function.